Speaker
Ming Lei
(Southwest Jiaotong University)
Description
Nb thin films on different substrates have been prepared by DC magnetron sputtering for capacitor application. The influences of substrates on film morphology, crystallographic structure and characters have been investigated. Superconducting transition temperatures of the films have been measured and relationship between the transition temperatures and deposition conditions have been studied. The superconducting transition temperature (Tc) is found to decrease monotonically with the increase of the lattice parameter (a) irrespective of its thickness and grain size.